Top view of stage Unit: mm 40 360 40 70 60 60 60 60 60 70 30 90 200 (Measurement Range) 60 300 230 360 60 60 90 30 250 (Measurement Rang) Specifications 280 20XM6 Depth 10 iNEXIV VMA-2520 main body 440 Stroke (X x Y x Z) 250 x 200 x 200mm (10"x 8"x 8") Common measurement range With Touch Probing 200 x 200 x 166mm (TP20) 200 x 200 x 170mm (TP200) Dimensional diagram Unit: mm With TP & MCR20 175 x 200 x 166mm (TP20) 175 x 200 x 170mm (TP200) Minimum readout 0.1μm 690 245.5 Maximum workpiece weight 15kg (up to 5kg accuracy guaranteed) MPE* XY MPEE1: 2+8L/1000μmm (with Vision Probing) XY MPEE2: 3+8L/1000μm (with Vision Probing) Z MPEE1: 3+L/50μm (with Laser AF or Touch Probing) Repeatability (2σ)* Vision Probing: 1μm Laser AF: 1μm Touch Probing: 1μm (probe operates in all 740 to 940 three axis directions) Camera 1/3-in. 3CCD color 210 C T 303 Progressive scan (B/W optional) Working distance 73.5mm (63mm with LAF) 1357 to 1557 208 Magnification Optical: 0.35 to 3.5x On screen: 12 to 120x (with 17" monitor at SXGA resolution) 500 See page 5 for details 825 400 145 FOV size 13.3 x 10 to 1.33 x 1mm 420 380 Auto focus Vision AF and optional Laser AF 600 Illumination Contour illumination White LED illumination Surface illumination White LED illumination Oblique illumination 8-segment white LED ring 650 600 Video resolution 640 x 480 (pixels) 700 650 Touch probe Renishaw® TP200/TP20 (option) Power source 100V-240V, 50/60Hz Power consumption 5A-2.5A (excluding power consumption of host computer and its peripherals) Front view with TP20 & MCR20 Unit: mm Dimensions & weight Main body (W x D x H) 565 x 690 x 740mm (minimum height), 72kg Vision/TP Offset (X) Controller 145 x 400 x 390mm, 13kg 50 175 Vision/TP Common Table for main body (option) 600 x 700 x 825mm, 38kg Measurement Range (Hatching Area) Recommended workbench Min. load capacity 1000kg or more Operational environment CLASS 1 LASER PRODUCT Temperature 10°C to 35°C Humidity 70% or less Mechanical Coordinate 166 200 Origin (0, y, 0) Host computer (100) 93 CPU Intel Core 2 Duo 1.8GHz or faster 5 34 Graphic Card For 3D Application programs, please consult Nikon 7 Memory 2G or more 2.5 225 Operating system Windows® XP Pro SP2/Vista Business or later Vision Measurement Range Interface USB2.0/IEEE1394 *Nikon's in-house test at 20°C ±0.5k 11