Top view of stage Unit: mm

4036040
70606060606070

Specifications

250 (Measurement Rang)

iNEXIV VMA-2520 main body
Stroke (X x Y x Z)250 x 200 x 200mm (10"x 8"x 8")
Common measurement range
With Touch Probing200 x 200 x 166mm (TP20)
With TP & MCR20200 x 200 x 170mm (TP200) 175 x 200 x 166mm (TP20) 175 x 200 x 170mm (TP200)
Minimum readout0.1μm
Maximum workpiece weight15kg(upto 5kgaccuracy guaranteed)
MPEXY MPEE1: 2+8L/1000μmm (with Vision Probing) XY MPEE2: 3+8L/1000μm (with Vision Probing) Z MPEE1: 3+L/50μm (with Laser AF or Touch Probing)
Repeatability (2σ)Vision Probing: 1μm Laser AF: 1μm
Touch Probing: 1μm (probe operates in all three axis directions)
Camera1/3-in. 3CCD color
Progressive scan (B/W optional)
Workingdistance73.5mm (63mm with LAF)
MagnificationOptical: 0.35 to 3.5x
On screen: 12 to 120x (with 17" monitor at SXGA resolution) See page 5 for details
FOV size13.3 x 10 to 1.33 x 1mm
Auto focusVision AF and optional Laser AF
Illumination
Contour illuminationWhite LED illumination
Surface illuminationWhite LED illumination
Oblique illumination8-segment white LED ring
Video resolution640 x 480 (pixels)
TouchprobeRenishaw®TP200/TP20 (option)
Power source100V-240V, 50/60Hz
Power consumption5A-2.5A (excluding power consumption of host
computer and itsperipherals)
Dimensions & weight
Main body (W x D x H)565 x 690 x 740mm (minimum height), 72kg
Controller145 x 400 x 390mm, 13kg
Table for main body(option)600 x 700 x 825mm, 38kg
Recommended workbenchMin. load capacity1000kgor more
Operational environment
Temperature10°C to 35°C
Humidity70% or less
Host computer
CPUIntel Core 2 Duo 1.8GHz or faster
Graphic CardFor 3D Applicationprograms,please consult Nikon
Memory2G or more
OperatingsystemWindows®XP Pro SP2/Vista Business or later
InterfaceUSB2.0/IEEE1394

280 20XM6 Depth 10

690 245.5

303

700 650

Front view with TP20 & MCR20 Unit: mm

Measurement Range

Mechanical Coordinate Origin (0, y, 0)

*Nikon's in-house test at 20°C ±0.5k