
Top view of stage Unit: mm
| 40 | 360 | 40 | ||||
| 70 | 60 | 60 | 60 | 60 | 60 | 70 |
250 (Measurement Rang)
| iNEXIV VMA-2520 main body | |
| Stroke (X x Y x Z) | 250 x 200 x 200mm (10"x 8"x 8") |
| Common measurement range | |
| With Touch Probing | 200 x 200 x 166mm (TP20) |
| With TP & MCR20 | 200 x 200 x 170mm (TP200) 175 x 200 x 166mm (TP20) 175 x 200 x 170mm (TP200) |
| Minimum readout | 0.1μm |
| Maximum workpiece weight | 15kg(upto 5kgaccuracy guaranteed) |
| MPE | XY MPEE1: 2+8L/1000μmm (with Vision Probing) XY MPEE2: 3+8L/1000μm (with Vision Probing) Z MPEE1: 3+L/50μm (with Laser AF or Touch Probing) |
| Repeatability (2σ) | Vision Probing: 1μm Laser AF: 1μm |
| Touch Probing: 1μm (probe operates in all three axis directions) | |
| Camera | 1/3-in. 3CCD color |
| Progressive scan (B/W optional) | |
| Workingdistance | 73.5mm (63mm with LAF) |
| Magnification | Optical: 0.35 to 3.5x |
| On screen: 12 to 120x (with 17" monitor at SXGA resolution) See page 5 for details | |
| FOV size | 13.3 x 10 to 1.33 x 1mm |
| Auto focus | Vision AF and optional Laser AF |
| Illumination | |
| Contour illumination | White LED illumination |
| Surface illumination | White LED illumination |
| Oblique illumination | 8-segment white LED ring |
| Video resolution | 640 x 480 (pixels) |
| Touchprobe | Renishaw®TP200/TP20 (option) |
| Power source | 100V-240V, 50/60Hz |
| Power consumption | 5A-2.5A (excluding power consumption of host |
| computer and itsperipherals) | |
| Dimensions & weight | |
| Main body (W x D x H) | 565 x 690 x 740mm (minimum height), 72kg |
| Controller | 145 x 400 x 390mm, 13kg |
| Table for main body(option) | 600 x 700 x 825mm, 38kg |
| Recommended workbench | Min. load capacity1000kgor more |
| Operational environment | |
| Temperature | 10°C to 35°C |
| Humidity | 70% or less |
| Host computer | |
| CPU | Intel Core 2 Duo 1.8GHz or faster |
| Graphic Card | For 3D Applicationprograms,please consult Nikon |
| Memory | 2G or more |
| Operatingsystem | Windows®XP Pro SP2/Vista Business or later |
| Interface | USB2.0/IEEE1394 |
280 20XM6 Depth 10
690 245.5
303
700 650
Front view with TP20 & MCR20 Unit: mm
Measurement Range
Mechanical Coordinate Origin (0, y, 0)
*Nikon's in-house test at 20°C ±0.5k